Next level of correlative imaging using AFM-in-SEM for comprehensive sample analyses
September 17th, 2020
Faculty of Civil and Industrial Engineering - Sapienza University of Rome
LiteScope™ produced by the NenoVision company represents a compact AFM, which is directly integrable into a large variety of SEMs in a plug-and-play manner. In general, the strength of the AFM-in-SEM hybrid system lies in combining the AFM modes (3D topography, electrical, mechanical and magnetic measurements) with SEM capabilities (fast imaging with wide resolution range, chemical analysis, surface modification, etc.). Further benefits include precise AFM tip navigation by SEM, roughness evaluation and in-situ measurement, which is essential for sensitive samples prone to oxidation. Uniquely, LiteScope design enables simultaneous acquisition and correlation of AFM and SEM data by a technique called Correlative Probe and Electron Microscopy (CPEM).
Dr. Jan Neuman – CEO and Co-founder